Pd-based integrated optical hydrogen sensor on a silicon-on-insulator platform.

نویسندگان

  • M Z Alam
  • Nicholas Carriere
  • Farshid Bahrami
  • Mo Mojahedi
  • J Stewart Aitchison
چکیده

We have experimentally demonstrated a compact, integrated optical hydrogen sensor on a silicon-on-insulator platform. The sensor consists of silicon waveguide coated with a thin palladium film. The sensitivity and response time of the sensor was tested for volumetric hydrogen concentrations ranging from 0% to 4%. The proposed hydrogen sensor shows great potential as a building block for an optical nose capable of simultaneous detection of multiple gases as well as environmental effects such as temperature and humidity.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Integrated Optical Gas Sensors on Silicon-on-Insulator Platform

We demonstrate highly sensitive micro-optical hydrogen and ethanol sensors on SOI microring resonators (MRR) using chemical coatings sensitive to the corresponding gases. Hydrogen concentrations below the lower explosion limit and ethanol vapor concentration below 100ppm are detected. ©2010 Optical Society of America OCIS codes: (000.0000) General; (000.0000)

متن کامل

Optimization of the Hybrid Silicon Photonic Integrated Circuit Platform

In the hybrid silicon platform, active III/V based components are integrated on a silicon-on-insulator photonic integrated circuit by means of wafer bonding. This is done in a self-aligned back-end process at low temperatures, making it compatible with CMOS-based silicon processing. This approach allows for low cost, high volume, high quality and reproducible chip fabrication. Such features mak...

متن کامل

Characterization of Quality-Factor Tunable Integrated Silicon Microtoroidal Resonators

Microresonators are basic building blocks for compact photonic integrated circuits (PICs). The performance of the microresonators depends on their intrinsic and loaded quality factors (Q). Here we demonstrate the optical characterization of a single crystalline silicon microtoroidal resonator with integrated MEMS-actuated tunable optical coupler. The device is realized on a two-layer silicon-on...

متن کامل

A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel an...

متن کامل

Advances in Silicon-on-Insulator Optoelectronics - Selected Topics in Quantum Electronics, IEEE Journal on

Recent developments in silicon based optoelectronics relevant to fiber optical communication are reviewed. Siliconon-insulator photonic integrated circuits represent a powerful platform that is truly compatible with standard CMOS processing. Progress in epitaxial growth of silicon alloys has created the potential for silicon based devices with tailored optical response in the near infrared. The...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:
  • Optics letters

دوره 38 9  شماره 

صفحات  -

تاریخ انتشار 2013